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Other articles related with "film thickness distribution":
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68104 |
Ying Yan(闫英), Ping Zhou(周平), Shang-Xiong Zhang(张尚雄), Xiao-Guang Guo(郭晓光), Dong-Ming Guo(郭东明) |
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Effect of substrate curvature on thickness distribution of polydimethylsiloxane thin film in spin coating process |
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Chin. Phys. B
2018 Vol.27 (6): 68104-068104
[Abstract]
(764)
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[PDF 998 KB]
(226)
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